Vacuum container shell and internal parts shaking requirements ①vacuum pump has sufficient mechanical strength and stiffness to ensure that the housing can withstand atmospheric pressure at room temperature and baking temperature, and in the baking (especially for ultra-high vacuum system ) Does not deform. ② air tightness. To maintain an intact vacuum environment, wall material should not have porous structure, cracks or other defects that cause leakage. Have a lower infiltration rate and outgassing rate. Â '¢ saturated vapor pressure at the operating temperature and baking temperature should be low enough (particularly important for ultra-high vacuum system). ④ chemical stability is good. Not easy to oxidation and corrosion, not with the working medium in the vacuum pump and the process of deflation chemical reaction. ⑤ good thermal stability. In the system operating temperature (high temperature and low temperature) to maintain good vacuum performance and mechanical properties. ⑥ working vacuum and working temperature, the vacuum vessel internal devices should maintain good working performance, to meet the requirements of the operation process. ⑦ better ductility, machinability and welding performance, easy to process into a complex shape of the shell.
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